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Ion beam lithograpy using a nano-aperture

✍ Scribed by M.L. Taylor; A. Alves; P. Reichart; R.D. Franich; S. Rubanov; P. Johnston; D.N. Jamieson

Book ID: 103862086
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 569 KB
Volume: 260
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.02.057

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