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Ion-beam induced damage and annealing behaviour in SiC

✍ Scribed by E. Wendler; A. Heft; W. Wesch

Book ID: 114170108
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 994 KB
Volume: 141
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00083-4

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