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Ion-beam-induced charge-collection imaging of CMOS ICs

✍ Scribed by F.W. Sexton; K.M. Horn; B.L. Doyle; J.S. Laird; M. Cholewa; A. Saint; G.J.F. Legge

Book ID: 113284012
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 754 KB
Volume: 79
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95382-f

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