Ion beam etching of lead–zirconate–titanate thin films: Correlation between etching parameters and electrical properties evolution

✍ Scribed by Soyer, C.; Cattan, E.; Rèmiens, D.; Guilloux-Viry, M.

• Book ID: 120998267
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 683 KB
• Volume: 92
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1476970