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Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-Beam Deposited Ta2O5 Films

✍ Scribed by Kulpa, A.; Jaeger, N. A. F.


Book ID
121729132
Publisher
The Electrochemical Society
Year
2012
Tongue
English
Weight
55 KB
Volume
159
Category
Article
ISSN
0013-4651

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