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Ion-beam deposition of NbNxCythin films for microelectronic applications

✍ Scribed by Lin, L.-J.; Prober, D.

Book ID: 114648983
Publisher: IEEE
Year: 1987
Tongue: English
Weight: 498 KB
Volume: 23
Category: Article
ISSN: 0018-9464
DOI: 10.1109/tmag.1987.1065146

No coin nor oath required. For personal study only.

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