Ion beam assisted deposition of multi-layer X-ray mirrors for the extreme ultraviolet lithography

✍ Scribed by T. Chassé; H. Neumann; B. Rauschenbach

• Book ID: 114167098
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 219 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00766-3