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Ion beam analysis of the dry thermal oxidation of thin polycrystalline SiGe films

✍ Scribed by A. Kling; J.C. Soares; A.C. Prieto; J. Jiménez; A. Rodríguez; J. Sangrador; T. Rodríguez

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 284 KB
Volume: 240
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.06.137

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