Ion beam analysis of high pressure deposition of epitaxial PZT thin films

Production of Thin Epitaxial Films Using

Production of Thin Epitaxial Films Using Ion Beam Deposition

✍ Gorris, F. ;Krug, C. ;Kubsky, S. ;Baumvol, I. J. R. ;Schulte, W. H. ;Rolfs, C. 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 188 KB 👁 2 views

An ion beam deposition system to produce isotopically pure epitaxial thin films of different materials has been designed and built. Using negative ions, problems due to mass interference with molecular ions could be significantly reduced, thus allowing the production, for instance, of 29 Si films of

Ion-beam deposition of thin films of fer

Ion-beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 160 KB

Ion beam analysis of thin films

✍ CJ Sofield; JA Cookson 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 157 KB

3108. Thin-film deposition using low-ene

3108. Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 133 KB

of Ti to a few percent. Pre-evaporation of a 300 ,~ thick CaF.~ parting layer allowed membrane removal by water-assisted peeling. Pressure testing showed membranes to have bulk tensile strength of 4.6-6.2,'< l09 dyn/cm 2 (68-92 kpsi) and to behave elastically. They could be mounted under high tensio

3109. Thin-film deposition using low-ene

3109. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 133 KB

of Ti to a few percent. Pre-evaporation of a 300 ,~ thick CaF.~ parting layer allowed membrane removal by water-assisted peeling. Pressure testing showed membranes to have bulk tensile strength of 4.6-6.2,'< l09 dyn/cm 2 (68-92 kpsi) and to behave elastically. They could be mounted under high tensio

Ion-beam-assisted deposition of Al2O3 th

Ion-beam-assisted deposition of Al2O3 thin films

✍ Rabi S. Bhattacharya; A.K. Rai; A.W. McCormick 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 554 KB