RF magnetron sputter deposition was used to deposit thin calcium phosphate (hydroxyapatite) layers on titanium alloy substrate material. We determined the precise amount of calcium, phosphorus, oxygen, and hydrogen in these films by combining two ion-beam analysis techniques: Rutherford backscatteri
✦ LIBER ✦
Ion beam analysis of sputter-deposited gold films for quartz resonators
✍ Scribed by H. Bergsåker; L. Ilyinsky; G. Portnoff
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 64 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0142-2421
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