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Ion beam analysis of interface reactions

✍ Scribed by A.E.T. Kuiper; F.H.P.M. Habraken


Book ID
113283029
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
451 KB
Volume
64
Category
Article
ISSN
0168-583X

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Thermal oxidation of 6H-SiC was investigated by ion beam analysis techniques. The mechanisms of oxygen transport and incorporation were accessed by sequential oxidations in dry O 2 enriched or not in the 18 O isotope and subsequent determinations of the 18 O profiles. After sequential 16 O 2 / 18 O