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Ion and substrate effects on surface reactions of CF[sub 2] using C[sub 2]F[sub 6], C[sub 2]F[sub 6]/H[sub 2], and hexafluoropropylene oxide plasmas

✍ Scribed by Butoi, Carmen I.; Mackie, Neil M.; Williams, Keri L.; Capps, Nathan E.; Fisher, Ellen R.

Book ID: 127301998
Publisher: AVS (American Vacuum Society)
Year: 2000
Tongue: English
Weight: 621 KB
Volume: 18
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1312371

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