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Ion and electron beam assisted fabrication of nanostructures integrated in microfluidic chips

✍ Scribed by A.A. Evstrapov; I.S. Mukhin; A.S. Bukatin; I.V. Kukhtevich

Book ID: 113823655
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 893 KB
Volume: 282
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2011.08.035

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