Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures

✍ Scribed by R. E. Sah; J. D. Ralston; J. Daleiden; E. C. Larkins; S. Weisser; J. Fleissner; W. Benz

• Book ID: 112814954
• Publisher: Springer US
• Year: 1996
• Tongue: English
• Weight: 925 KB
• Volume: 25
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/bf02655381