✦ LIBER ✦
Extremely smooth surface morphologies in N2/H2/CH4 based low energy chemically assisted ion beam etching of InP/GaInAsP
✍ Scribed by C.F. Carlström; S. Anand; G. Landgren
- Book ID
- 114086772
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 408 KB
- Volume
- 343-344
- Category
- Article
- ISSN
- 0040-6090
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