✦ LIBER ✦

Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy

✍ Scribed by M. Grundner; H. Jacob

Book ID: 104842006
Publisher: Springer
Year: 1986
Tongue: English
Weight: 939 KB
Volume: 39
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00616822

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## Abstract Diamond synthesis by microwave plasma assisted chemical vapour deposition (MPCVD) with a bias enhanced nucleation (BEN) step constitutes the most efficient method to obtain heteroepitaxy and is also useful to reach high nucleation densities. In this study, sequential reflection high‐ene