Sequential analysis of diamond nucleatio
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Sarrieu, C. ;Barth, N. ;Guise, A. ;Arnault, J. C. ;Saada, S. ;Barrat, S. ;Bauer-
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Article
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2009
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John Wiley and Sons
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English
⚖ 449 KB
## Abstract Diamond synthesis by microwave plasma assisted chemical vapour deposition (MPCVD) with a bias enhanced nucleation (BEN) step constitutes the most efficient method to obtain heteroepitaxy and is also useful to reach high nucleation densities. In this study, sequential reflection high‐ene