๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Investigation on the adhesion of polymer particles to the surface of a semiconductor

โœ Scribed by B.V. Derjaguin; Yu.P. Toporov; I.N. Aleinikova; L.N. Burta-Gapanovitch


Book ID
107880341
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
315 KB
Volume
45
Category
Article
ISSN
0079-6816

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Simulation of the Adhesion of Particles
โœ Kevin Cooper; Anand Gupta; Stephen Beaudoin ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 325 KB

The removal of micrometer and submicrometer particles from dielectric and metal films represents a challenge in postchemical mechanical polishing cleaning. Proper modeling of the adhesive force between contaminant particles and these films is needed to develop optimal solutions to postchemical mecha