Investigation of W-Ge-N deposited on Ge as a diffusion barrier for Cu metallization

✍ Scribed by S. Rawal; D.P. Norton; T.J. Anderson; L. McElwee-White

• Publisher: Springer
• Year: 2006
• Tongue: English
• Weight: 809 KB
• Volume: 85
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-006-3686-x