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Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films

✍ Scribed by W Kulisch; C Popov; L Zambov; J Buliř; M.P Delplancke-Ogletree; J Lančok; M Jelı́inek

Book ID: 114085271
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 271 KB
Volume: 377-378
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(00)01315-8

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