Investigation of the parameters of layers prepared through diffusion of boron and gadolinium from silicate and hybrid films into silicon wafers

✍ Scribed by I. V. Smirnova; O. A. Shilova; Yu. Z. Bubnov

• Book ID: 111468024
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2009
• Tongue: English
• Weight: 154 KB
• Volume: 35
• Category: Article
• ISSN: 1087-6596
• DOI: 10.1134/s1087659609010155