Features of simultaneous diffusion of boron and gadolinium in silicon from nanoscale hybrid organic-inorganic films

✍ Scribed by I. V. Smirnova; O. A. Shilova; V. A. Moshnikov; A. E. Gamarts

• Book ID: 111444467
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 217 KB
• Volume: 43
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782609100248