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Investigation of the low-pressure plasma-chemical conversion of fluorocarbon waste gases

โœ Scribed by F. W. Breitbarth; D. Berg; K. Dumke; H. -J. Tiller


Book ID
110676729
Publisher
Springer
Year
1997
Tongue
English
Weight
797 KB
Volume
17
Category
Article
ISSN
0272-4324

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