✦ LIBER ✦
Differences in radical generation due to chemical bonding of gas molecules in a high-density fluorocarbon plasma: Effects of the C[Double Bond]C bond in fluorocarbon gases
✍ Scribed by Samukawa, Seiji; Mukai, Tomonori
- Book ID
- 125452992
- Publisher
- AVS (American Vacuum Society)
- Year
- 1999
- Tongue
- English
- Weight
- 258 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.581983
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