Investigation of the low dielectric siloxane-based hydrogen silsesquioxane (HSQ) as passivation layer on TFT-LCD

✍ Scribed by Ta-Shan Chang; Ting-Chang Chang; Po-Tsun Liu; Shu-Wei Tsao; Feng-Sheng Yeh

• Book ID: 108289889
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 573 KB
• Volume: 516
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2007.08.014