Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD

✍ Scribed by Ta-Shan Chang; Ting-Chang Chang; Po-Tsun Liu; C.Y. Chiang; S.C. Chen; Feng-Sheng Yeh

• Book ID: 108289432
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 284 KB
• Volume: 515
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2006.07.053