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Investigation of the effects of room-temperature nitrogen implantation on the precipitation of aluminium nitride

✍ Scribed by A.P. Matthews; M. Iwaki; Y. Horino; M. Satou; K. Yabe


Book ID
113281620
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
599 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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