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Investigation of the effects of pretreatment on the interaction between a GaAs(100) surface and an oxygen (ECR) plasma

✍ Scribed by GM Mikhailov; SA Khudobin; IV Malikov

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 487 KB
Volume: 46
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(93)e0012-a

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