X-Ray Photoelectron Spectroscopic Investigation of the GaAs Nitridation Mechanism with an ECR Plasma Source

✍ Scribed by Sauvage-Simkin, M. ;Garreau, Y. ;Barski, A. ;Langer, R. ;Cvetko, D. ;Floreano, F. ;Gotter, R. ;Santaniello, A. ;Verdini, A.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 160 KB
• Volume: 176
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199911)176:1<671::aid-pssa671>3.0.co;2-e