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Investigation of the aluminium oxidation in an oxygen plasma excited by microwaves

✍ Scribed by A. Quade; H. Wulff; H. Steffen; T.M. Tun; R. Hippler


Book ID
114085348
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
320 KB
Volume
377-378
Category
Article
ISSN
0040-6090

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