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The anodic oxidation of GaAs in an oxygen plasma generated by a D.C. electrical discharge

✍ Scribed by Fusako Koshiga; Takuo Sugano

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 847 KB
Volume: 56
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90050-6

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