Investigation of tantalum film properties by layers : F. C. Livermore et al. J. Vac. Sci. Technol. 8, No. 1, January–February (1971), p. 155

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 219 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90563-x