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Effect of stress on the physical properties of thin films : E. Klokholm. J. Vac. Sci. Technol. 8, No. 1, January–February (1971), p. 148

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 114 KB
Volume: 11
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(72)90568-9

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