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Investigation of TaN films implanted with nitrogen and argon ions

✍ Scribed by Q.Y. Zhang; B. Chen; G.B. Li; S. Jin; F.X. Chen; D.Z. Yang; Y.C. Zhu

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
353 KB
Volume
66
Category
Article
ISSN
0257-8972

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