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Investigation of properties of Cu containing DLC films produced by PECVD process

✍ Scribed by Neeraj Dwivedi; Sushil Kumar; Hitendra K. Malik; C. Sreekumar; Saurabh Dayal; C.M.S. Rauthan; O.S. Panwar


Book ID
113743511
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
737 KB
Volume
73
Category
Article
ISSN
0022-3697

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