Investigation of polycrystalline silicon layers by electron microscopy and X-ray diffraction : S. Horiuchi. Solid State Electronics18, 1111 (1975)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 248 KB
• Volume: 15
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(76)90344-9