We report on the investigation of surface acoustic wave (SAW) Γelds by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface osc
β¦ LIBER β¦
Investigation of nano-electromechanical-systems using surface acoustic waves
β Scribed by F.W. Beil; A. Wixforth; R.H. Blick
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 236 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1386-9477
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