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Investigation of growth, coverage and effectiveness of plasma assisted nano-films of fluorocarbon

โœ Scribed by Pratik P. Joshi; Rajasekhar Pulikollu; Steven R. Higgins; Xiaoming Hu; S.M. Mukhopadhyay


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
886 KB
Volume
252
Category
Article
ISSN
0169-4332

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