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Investigation of gas phase mechanisms during deposition of diamond films

✍ Scribed by R. Beckmann; S. Reinke; M. Kuhr; W. Kulisch; R. Kassing


Book ID
107930273
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
521 KB
Volume
60
Category
Article
ISSN
0257-8972

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