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Investigation of gas phase composition during the process of electrical-discharge doping: V M Biryukov et al, Elektron Tekh Upr Kachest Standard, 5, 1970, 96–99 (in Russian)


Publisher
Elsevier Science
Year
1971
Tongue
English
Weight
172 KB
Volume
21
Category
Article
ISSN
0042-207X

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