Investigation of diode geometry and metal line pattern for robust ESD protection applications

✍ Scribed by You Li; Juin J. Liou; Jim Vinson

• Book ID: 104057990
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 163 KB
• Volume: 48
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2008.04.019

✦ Synopsis

The effect of different diode geometries and metal patterns on the failure current It2 is investigated experimentally. The devices considered are N+/P well LOCOS diodes having different lengths, widths, finger numbers, and metal connections. The results provide useful insights into optimizing the diode for robust electrostatic discharge (ESD) protection applications.