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Investigation of diffraction gratings with the use of a differential heterodyne microscope

โœ Scribed by I. M. Akhmedzhanov; D. V. Baranov; E. M. Zolotov


Book ID
110138659
Publisher
SP MAIK Nauka/Interperiodica
Year
2004
Tongue
English
Weight
75 KB
Volume
96
Category
Article
ISSN
0030-400X

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A theory of the image formation for a scanning differential heterodyne microscope is presented using the rigorous diffraction theory for perfectly conducting arbitrary-surfaced object. Computed results are compared with experimental responses to a step-like object with the 0.35 ฮผm height and the 0.3