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Investigation of defects in amorphous silicon films using positron annihilation

✍ Scribed by Yang-Fang Chen; Chia-Chi Wang; Poh-Kun Tseng; Jun-Tseng Lue


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
300 KB
Volume
134
Category
Article
ISSN
0375-9601

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