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Investigation of voids distribution in amorphous hydrogenated carbon nitride films by positron annihilation and thermal gas evolution experiments

✍ Scribed by F.L. Freire Jr.; C.A. Achete; R.S. Brusa; G. Mariotto; X.T. Teng; A. Zecca


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
364 KB
Volume
91
Category
Article
ISSN
0038-1098

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