Investigation of chromium, cobalt, and nickel-implantation in silicon using Auger electron spectrometry, secondary ion mass spectrometry, Rutherford backscattering spectrometry, and Monte Carlo simulation

✍ Scribed by Bubert, Henning.; Palmetshofer, Leopold.; Stingeder, Gerhard.; Wielunski, Marek.

• Book ID: 127129079
• Publisher: American Chemical Society
• Year: 1991
• Tongue: English
• Weight: 987 KB
• Volume: 63
• Category: Article
• ISSN: 0003-2700
• DOI: 10.1021/ac00015a012