The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macroporous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP fo
โฆ LIBER โฆ
Investigation of capacitive humidity sensing behavior of silicon nanowires
โ Scribed by Huilin Li; Jian Zhang; BaiRui Tao; LiJuan Wan; WenLi Gong
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 654 KB
- Volume
- 41
- Category
- Article
- ISSN
- 1386-9477
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