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Investigation into the Use of Hybrid Solutions for ΣΔ A/D Converter Testing

✍ Scribed by K. Georgopoulos; A. Lechner; M. Burbidge; A. Richardson

Book ID
106384307
Publisher
Springer US
Year
2006
Tongue
English
Weight
407 KB
Volume
22
Category
Article
ISSN
0923-8174

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In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a i-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that