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Investigation and control of microcracks in tin oxide gas sensing thin-films

โœ Scribed by Zhenan Tang; Philip C.H. Chan; Rajnish K. Sharma; Guizhen Yan; I-Ming Hsing; Johnny K.O. Sin


Book ID
108469401
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
538 KB
Volume
79
Category
Article
ISSN
0925-4005

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Highly sensitive, Si-integrated gas sensors based on undoped, In-and Sb-doped nanocrystalline SnO 2 -films, have been fabricated by spray pyrolysis. We have found that the In-doped gas sensors show significantly improved sensitivity for CH 4 detection and low sensitivity for H 2 detection, while Sb-