Introductory MEMS: Fabrication and Applications

✍ Scribed by Thomas M. Adams, Richard A. Layton (auth.)

• Publisher: Springer US
• Year: 2010
• Tongue: English
• Leaves: 446
• Edition: 1
• Category: Library

✦ Synopsis

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

✦ Table of Contents

Front Matter....Pages i-xiii
Front Matter....Pages 1-1
Introduction....Pages 3-16
The substrate and adding material to it....Pages 17-63
Creating and transferring patterns—Photolithography....Pages 65-94
Creating structures—Micromachining....Pages 95-130
Solid mechanics....Pages 131-153
Front Matter....Pages 155-155
Thinking about modeling....Pages 157-165
MEMS transducers—An overview of how they work....Pages 167-210
Piezoresistive transducers....Pages 211-230
Capacitive transducers....Pages 231-253
Piezoelectric transducers....Pages 255-282
Thermal transducers....Pages 283-316
Introduction to microfluidics....Pages 317-368
Front Matter....Pages 369-369
Microfabrication laboratories....Pages 371-403
Back Matter....Pages 1-37

✦ Subjects

Electronics and Microelectronics, Instrumentation;Circuits and Systems;Mechanics;Surfaces and Interfaces, Thin Films;Continuum Mechanics and Mechanics of Materials