Electroceramic-Based MEMS:Fabrication-Technology and Applications

✍ Scribed by N. Setter

Year: 2005
Tongue: English
Leaves: 416
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

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